Cryopump
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Cryopump
1. An exposed surface refrigerated to cryogenic
temperature for the purpose of pumping gases in a vacuum chamber by
condensing the gas and maintaining the condensate at a temperature such that
the equilibrium vapor pressure is equal to or less than the desired ultimate
pressure in the chamber.
2. The act of removing gases from an enclosure by condensing the gases on
surfaces at cryogenic temperature.
Also referred to as a cryogenic pump and not to be confused with
cryogenic fluid pump for circulating cryogenic propellants.
References
This article is based on NASA's Dictionary of Technical Terms for Aerospace Use